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Argon

Argon, Ar, is a colorless, nonflammable, high-pressure gas. It acts as a simple asphyxiant by displacing air.

Applications
In semiconductor industry, argon is used for:

  • carrier/purge gas
  • blanket gas to exclude air from certain fabrication processes, especially in crystal growing
  • ion milling and other etching processes
  • ion implantation
  • sputtering
  • gate oxidation anneal gas.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Aluminum; Zinc; Copper; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF; Polyvinylchloride; Kalrez.
Elastomers: Viton; Buna-N; Neoprene; Polyurethane.

Technical Properties
Molecular Weight: 39.95
Specific Gravity (Air = 1): 1.4
Odor: None
CAS Registry No.: 7440-37-1