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Arsine, AsH3, is a colourless, poisonous, flammable, liquefied, compressed gas shipped at its vapour pressure of 205 psig (1,410 kPa) at 70°F (21°C).

In the semiconductor industry, Arsine is used:

  • as an n-type dopant for epitaxial silicon (often mixed with hydrogen)
  • for doping selected regions of silicon wafer using deposition/diffusion techniques to form shallow structures such as emitters or source drain contacts (usually high ppm to percentage mixtures with nitrogen) or
  • for doping selected regions using ion implantation (often mixed with hydrogen).

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Copper; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; Polyvinylchloride; PVDF; Kalrez.
Elastomers: Viton; Buna-N; Neoprene.

Technical Properties
Molecular Weight: 77.95
Specific Gravity (Air = 1): 2.7
Odour: Garlic-Like
CAS Registry No.: 7784-42-1