Boron-11 Trifluoride header

Boron-11 Trifluoride

Boron-11 Trifluoride header

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Boron-11 Trifluoride

Boron-11 Trifluoride (enriched), 11BF3, is a colourless, toxic, nonflammable, corrosive, high-pressure gas.

Applications
In the semiconductor industry, Boron-11 Trifluoride is used for:

  • p-type diffusion in silicon
  • ion implantation.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Copper; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF; Polyvinylchloride.
Elastomers: Viton.

Technical Properties
Molecular Weight: 68.00
Specific Gravity (Air = 1): 2.4
Odour: Pungent, Suffocating
CAS Registry No.: 7637-07-2