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Boron Trifluoride

Boron Trifluoride, BF3, is a colourless, toxic, nonflammable, corrosive, high-pressure gas.

Applications
Pure boron trifluoride is used:

  • in semiconductor fabrication, boron trifluoride is used for p-type diffusion in silicon.
  • in ion implantation.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Copper; Monel.
Plastics: Kel-F; PTFE, PVC; PE.

Technical Properties
Molecular Weight: 67.81
Specific Gravity (Air=1): 2.34
Odour: Pungent, Suffocating
CAS Registry No.: 7637-07-2