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Carbon Monoxide

Carbon Monoxide, CO, is a colourless, flammable, toxic, high-pressure gas.

In the semiconductor industry, Carbon Monoxide is used for:

  • selective oxide etching in conjunction with C4F8.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Aluminum; Zinc; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF; Polyvinylchloride.
Elastomers: Kalrez; Buna-N; Neoprene; Polyurethane.

Technical Properties
Molecular Weight: 28.01
Specific Gravity (Air = 1): 0.97
Odour: None
CAS Registry No.: 630-08-0