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Chlorine

Chlorine, Cl2, is a greenish-yellow, toxic, nonflammable, corrosive gas shipped at its own vapour pressure of 85 psig (586 kPa) at 70°F (21°C).

Applications
In the semiconductor industry, chlorine is used for:

  • plasma etching of aluminum and other metal layers.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; Kalrez; PVDF.
Elastomers: Viton.

Technical Properties
Molecular Weight: 70.91
Specific Gravity (Air=1): 2.5
Odour: Pungent, Irritating
CAS Registry No.: 7782-50-5