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Diborane, B2H6, is a colourless, unstable, highly toxic, flammable gas with a sickly, sweet odour.

Pure Diborane is used:

  • in semiconductor fabrication: a p-type dopant, for epitaxial silicon
  • in semiconductor fabrication: for doping selected regions of a silicon wafer using deposition/diffusion techniques
  • for doping polycrystalline silicon for interconnects or certain capacitors
  • for forming borophosphosilicate glasses
  • as a source of hydrogen in various chemical reactions.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Copper; Monel; Hastelloy.
Plastics: Kel-F; PTFE, Nylon.
Elastomers: Viton.

Technical Properties
Molecular Weight: 27.67
Specific Gravity (Air = 1): 0.95
Odour: Repulsive
CAS Registry No.: 19287-45-7