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Dichlorosilane, SiH2Cl2, is a colourless, poisonous, highly toxic, corrosive, flammable, liquified gas with a sharp, hydrochloric acid odour.

Pure dichlorosilane is used:

  • as a silicon-precursor gas used in semiconductor fabrication, in epitaxial
  • in semiconductor fabrication: chemical vapour deposition processes to deposit layers of silicon or silicon compounds
  • in the manufacturing of organo silicon compounds.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Ni-Cu alloys; Hastelloy A, B, C; Inconel.
Plastics: Kel-F; PTFE, PVC; PE (low polymer).
Elastomers: Viton.

Technical Properties
Molecular Weight: 101.01
Specific Gravity (Air = 1): 3.52
Odour: Pungent, suffocating
CAS Registry No.: 4109-96-0