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Disilane

Disilane, Si2H6, is a pyrophoric, colourless gas.

Applications
In the semiconductor industry, disilane is used for:

  • rapid low temperature deposition of epitaxial silicon, amorphous silicon and silicon-based dielectrics.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel.
Plastics: Kel-F; Tefzel.
Elastomers: Viton; Neoprene.

Technical Properties
Molecular Weight: 62.22
Specific Gravity (Air=1): 2.3
Odour: Repulsive
CAS Registry No.: 1590-87-0