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Germane

Germane, GeH4, is a flammable, toxic, colourless gas.

Applications
In the semiconductor industry, germane is used for:

  • deposition of epitaxial and amorphous silicon-germanium alloys.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel.
Plastics: Kel-F; Tefzel.

Technical Properties
Molecular Weight: 76.66
Specific Gravity (Air=1): 2.7
Odour: Undetectable to sweet, Fish-Like to pungent
CAS Registry No.: 7782-65-2