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Germanium tetrafluoride

Germanium Tetrafluoride, GeF4, is a colourless, poisonous, acid gas.

Applications
In the semiconductor industry, germanium tetrafluoride is used for:

  • ion implantation.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel.
Plastics: Kel-F.

Technical Properties
Molecular Weight: 148.58
Specific Gravity (Air=1): 5.16
Odour: Pungent, Garlic
CAS Registry No.: 7783-58-6