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Halocarbon 14

Halocarbon 14, CF4, (tetrafluoromethane) is a colourless, nonflammable, high-pressure gas.

With added oxygen, CF4 (usually >80% mixture concentration) is used for plasma etching of polysilicon, silicon dioxide, silicon nitride, refractory metals and metal silicides. Etching and stripping of photoresists and other polymers are also major uses of CF4 (usually <20%) and oxygen mixtures.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Aluminum; Copper; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF.
Elastomers: Viton; Buna-N; Neoprene; Polyurethane.

Technical Properties
Molecular Weight: 88
Specific Gravity (Air=1): 3.04
Odour: None
CAS Registry No.: 75-73-0