Halocarbon 218

Halocarbon 218, C₃F₈, (octafluoropropane) is a colourless, nontoxic, nonflammable gas shipped at its own vapour pressure of 100 psig (48 kPa) at 70°F (21°C).

Applications
In the semiconductor industry, halocarbon 218 is used for:

• plasma etching and CVD reactor cleaning of SiO₂.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Aluminum; Zinc; Copper; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF; Polyvinylchloride; Kalrez.
Elastomers: Viton; Buna-N; Neoprene; Polyurethane.

Technical Properties
Molecular Weight: 188
Specific Gravity (Air=1): 6.7
Odour: Faintly Sweet
CAS Registry No.: 76-19-7