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Halocarbon 32

Halocarbon 32, CH2F2, (difluoromethane) is a colourless, odourless, flammable gas shipped at its vapour pressure of 232 psig (1,600 kPa) at 70°F (21°C).

Applications
In the semiconductor industry, halocarbon 32 is used for:

  • plasma etching of silicon compound films.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Copper; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF.
Elastomers: Viton; Buna-N; Neoprene; Polyurethane.

Technical Properties
Molecular Weight: 52.02
Specific Gravity (Air=1): 1.85
Odour: Slightly Ethereal
CAS Registry No.: 75-10-5