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Halocarbon RC318

Halocarbon RC318, C4F8, (octafluorocyclobutane) is a nonflammable, colourless, odourless, tasteless gas shipped at its own vapour pressure of 25 psig (170 kPa) at 70°F (21°C).

Applications
In the semiconductor industry, halocarbon RC318 is used:

  • in combination with carbon monoxide for selective oxide etch.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Aluminum; Zinc; Copper; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF; Polyvinylchloride; Kalrez.
Elastomers: Viton; Buna-N; Neoprene; Polyurethane.

Technical Properties
Molecular Weight: 200.03
Specific Gravity (Air=1): 7.3
Odour: None
CAS Registry No.: 115-25-3