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Hydrogen chloride

Hydrogen chloride, HCl, is a colourless, toxic, corrosive gas shipped at its own vapour pressure of 613 psig (4,200 kPa) at 70°F (21°C).

In the semiconductor industry, hydrogen chloride is used for:

  • etching of native oxide prior to epitaxial deposition
  • CVD reactor cleaning, moisture getter in CVD oxides.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF; Polyvinylchloride; Kalrez.
Elastomers: Viton; Polyurethane.

Technical Properties
Molecular Weight: 36.46
Specific Gravity (Air=1): 1.3
Odour: Irritating
CAS Registry No.: 7647-01-0