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Hydrogen chloride

Hydrogen chloride, HCl is a colourless, poisonous, highly toxic, corrosive, nonflammable, liquified gas with a pungent odour.

Pure hydrogen chloride is used:

  • in the electronics industry as carrier for non-volatile elements and in selective etching
  • in semiconductor fabrication: etching of native oxide prior to epitaxial deposition; CVD reactor cleaning, moisture getter in CVD oxides.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Monel.
Plastics: Kel-F; PTFE; PVC.
Elastomers: Viton; Natural rubber.

Technical Properties
Molecular Weight: 36.46
Specific Gravity (Air = 1): 1.3
Odour: Pungent
CAS Registry No.: 7647-01-0