Hydrogen chloride - SIAD Società Italiana Acetilene e Derivati
Hydrogen chloride header
Hydrogen chloride, HCl is a colourless, poisonous, highly toxic, corrosive, nonflammable, liquified gas with a pungent odour.
Pure hydrogen chloride is used:
- in the electronics industry as carrier for non-volatile elements and in selective etching
- in semiconductor fabrication: etching of native oxide prior to epitaxial deposition; CVD reactor cleaning, moisture getter in CVD oxides.
Metals: Stainless Steel; Carbon Steel; Monel.
Plastics: Kel-F; PTFE; PVC.
Elastomers: Viton; Natural rubber.
Molecular Weight: 36.46
Specific Gravity (Air = 1): 1.3
CAS Registry No.: 7647-01-0