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Hydrogen fluoride

Hydrogen fluoride, HF, is a colourless, toxic, corrosive, nonflammable gas shipped at its vapour pressure of 0.6 psig (2.1 kPa) at 70°F (21°C).

In the semiconductor industry, hydrogen fluoride is used for:

  • native oxide etch from silicon wafers.

Materials Compatibility
Metals: Stainless Steel; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; PVDF.
Elastomers: Viton.

Technical Properties
Molecular Weight: 20
Specific Gravity (Air=1): 0.7
Odour: Sharp, Irritating
CAS Registry No.: 7664-39-3