Hydrogen fluoride header
Hydrogen fluoride, HF, is a colourless, toxic, corrosive, nonflammable gas shipped at its vapour pressure of 0.6 psig (2.1 kPa) at 70°F (21°C).
In the semiconductor industry, hydrogen fluoride is used for:
- native oxide etch from silicon wafers.
Metals: Stainless Steel; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; PVDF.
Molecular Weight: 20
Specific Gravity (Air=1): 0.7
Odour: Sharp, Irritating
CAS Registry No.: 7664-39-3