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Methylsilane, CH3SiH3, is a flammable, colourless, liquified, compressed gas shipped at its vapour pressure of 193 psig (1,330 kPA) at 70°F (21°C).

In the semiconductor industry, methylsilane is used for:

  • silicon carbide epitaxy
  • dry processable photo resist.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel.
Plastics: Kel-F.

Technical Properties
Molecular Weight: 46.15
Specific Gravity (Air=1): 1.6
Odour: Mildly Repulsive
CAS Registry No.: 992-94-9