Methylsilane

Methylsilane, CH₃SiH₃, is a flammable, colourless, liquified, compressed gas shipped at its vapour pressure of 193 psig (1,330 kPA) at 70°F (21°C).

Applications
In the semiconductor industry, methylsilane is used for:

• silicon carbide epitaxy
• dry processable photo resist.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel.
Plastics: Kel-F.

Technical Properties
Molecular Weight: 46.15
Specific Gravity (Air=1): 1.6
Odour: Mildly Repulsive
CAS Registry No.: 992-94-9