Methylsilane - SIAD Società Italiana Acetilene e Derivati
Methylsilane, CH3SiH3, is a flammable, colourless, liquified, compressed gas shipped at its vapour pressure of 193 psig (1,330 kPA) at 70°F (21°C).
In the semiconductor industry, methylsilane is used for:
- silicon carbide epitaxy
- dry processable photo resist.
Metals: Stainless Steel; Carbon Steel.
Molecular Weight: 46.15
Specific Gravity (Air=1): 1.6
Odour: Mildly Repulsive
CAS Registry No.: 992-94-9