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Nitrogen Trifluoride

Nitrogen Trifluoride, NF3, is a colourless, toxic, nonflammable, corrosive gas shipped in cylinders at high pressure.

Applications
In the semiconductor industry, nitrogen trifluoride is used for:

  • plasma and thermal cleaning of CVD reactors.

Materials Compatibility
Metals: Stainless Steel; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; PVDF.

Technical Properties
Molecular Weight: 71.019
Specific Gravity (Air=1): 2.46
Odour: Mold-Like
CAS Registry No.: 7783-54-2