Nitrogen Trifluoride header
Nitrogen Trifluoride, NF3, is a colourless, toxic, nonflammable, corrosive gas shipped in cylinders at high pressure.
In the semiconductor industry, nitrogen trifluoride is used for:
- plasma and thermal cleaning of CVD reactors.
Metals: Stainless Steel; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; PVDF.
Molecular Weight: 71.019
Specific Gravity (Air=1): 2.46
CAS Registry No.: 7783-54-2