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Nitrous Oxide

Nitrous Oxide, N2O, is a colourless, oxidizing, liquefied, high-pressure gas shipped at its vapour pressure of 745 psig (5,140 kg/cm2) at 70°F (21°C).

In the semiconductor industry, Nitrous Oxide is used as:

  • oxygen source for Chemical Vapour Deposition (CVD) of silicon dioxide, SiO2.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Zinc; Monel.
Plastics: PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF.
Elastomers: Viton.

Technical Properties
Molecular Weight: 44.01
Specific Gravity (Air = 1): 1.53
Odour: Sweet
CAS Registry No.: 10024-97-2