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Phosphine

Phosphine, PH3, is a colourless, poisonous, flammable, liquefied, high-pressure gas shipped at its vapour pressure of 592.7 psig (4,090 kPa) at 68°F (20°C).

Applications
In thesemiconductor industry, phosphine is used:

  • as an n-type dopant, for epitaxial silicon (typically ppm mixtures with hydrogen balance gas), for doping selected regions of a silicon wafer using deposition/diffusion techniques to form structures such as emitters, source-drains, and collector contacts (typically high ppm to percentage mixtures with nitrogen)
  • for doping polycrystalline silicon for interconnects or certain capacitors
  • for forming borophosphosilicate glasses (typically percentage mixtures with silane) and
  • for ion implantation (typically 15% PH3 balance hydrogen mixtures in small cylinders).

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; PVDF; Kalrez.
Elastomers: Viton; Buna-N; Neoprene; Polyurethane.

Technical Properties
Molecular Weight: 34.00
Specific Gravity (Air = 1): 1.18
Odour: Decaying Fish
CAS Registry No.: 7803-51-2