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Silicon tetrachloride

Silicon tetrachloride, SiCl4 is a colourless, highly toxic, nonflammable liquid with a pungent odour.

Pure silicon tetrachloride is used:

  • in semiconductor fabrication, applications of epitaxial silicon
  • in semiconductor fabrication, plasma etching of metals
  • in organo silicon processes
  • in the manufacturing of fused silica fiber.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Monel.
Plastics: Kel-F; PTFE.

Technical Properties
Molecular Weight: 169.90
Specific Gravity (Air = 1): 5.8
Odour: Pungent, suffocating
CAS Registry No.: 10026-04-7