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Sulphur Dioxide

Sulphur Dioxide, SO2, is an irritating, nonflammable, colourless, toxic gas at room temperature and atmospheric pressure. It is shipped as a liquefied, compressed gas at its vapour pressure of 34.4 psig (237 kPa) at 70°F (21°C).

In the semiconductor industry, Sulphur Dioxide is used for:

  • selective oxide etch.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF; Polyvinylchloride.
Elastomers: Kalraz; Viton; Polyurethane.

Technical Properties
Molecular Weight: 64.06
Specific Gravity (Air = 1): 2.3
Odour: Rotten Eggs
CAS Registry No.: 7446-09-5