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Sulphur hexafluoride

Sulphur hexafluoride, SF6, is a colourless, nonflammable, liquified, compressed gas shipped at its vapour pressure of 320 psig (2,200 kPa) at 70°F (21°C).

In the semiconductor industry, sulphur hexafluoride is used as:

  • fluorine source for high density plasma etching; it offers high selectivity without generating carbon by-products.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Aluminum; Copper; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF; Polyvinylchloride.
Elastomers: Viton; Buna-N; Neoprene; Polyurethane.

Technical Properties
Molecular Weight: 146.05
Specific Gravity (Air=1): 5.1
Odour: None
CAS Registry No.: 2551-62-4