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Sulphur hexafluoride

Sulphur hexafluoride, SF6 is a colourless, odourless, nonflammable, liquified gas.

Applications
Pure sulphur hexafluoride is used:

  • as a dielectric in transformers
  • as a blanketing agent in metal fabrication
  • in semiconductor fabrication: fluorine source for high density plasma etching - offers high selectivity without generating carbon by-products.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Aluminum; Copper; Monel.
Plastics: Kel-F; PTFE; PVC.
Elastomers: Viton; Buna-N; Neoprene.

Technical Properties
Molecular Weight: 146.05
Specific Gravity (Air = 1): 5.04
Odour: None
CAS Registry No.: 2551-62-4