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Trichlorosilane, HSiCl3 is a colourless, corrosive, flammable liquid with an irritating, choking odour.

Pure trichlorosilane is used:

  • in organo silicon chemical reactions
  • in semiconductor fabrication: epitaxial deposition of silicon, especially for thicker (>5 microns) layers where an abrupt transition profile and tight process control for film thickness are not critical.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Monel.
Plastics: Kel-F; PTFE.

Technical Properties
Molecular Weight: 135.5
Specific Gravity (Air = 1): 4.7
Odour: Irritating, choking odour
CAS Registry No.: 10025-78-2