Trichlorosilane - SIAD Società Italiana Acetilene e Derivati
Trichlorosilane, HSiCl3 is a colourless, corrosive, flammable liquid with an irritating, choking odour.
Pure trichlorosilane is used:
- in organo silicon chemical reactions
- in semiconductor fabrication: epitaxial deposition of silicon, especially for thicker (>5 microns) layers where an abrupt transition profile and tight process control for film thickness are not critical.
Metals: Stainless Steel; Carbon Steel; Monel.
Plastics: Kel-F; PTFE.
Molecular Weight: 135.5
Specific Gravity (Air = 1): 4.7
Odour: Irritating, choking odour
CAS Registry No.: 10025-78-2