Trimethylboron - SIAD Società Italiana Acetilene e Derivati
Trimethylboron, B(CH3)3, is a pyrophoric, colourless, toxic gas.
In the semiconductor industry, trimethylboron is used:
- as a boron source for the simultaneous deposition of boron and carbon or as the boron source in BPSG deposition.
Metals: Stainless Steel; Carbon Steel.
Molecular Weight: 55.92
Specific Gravity (Air = 1): 1.9
CAS Registry No.: 593-90-8