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Trimethylboron

Trimethylboron, B(CH3)3, is a pyrophoric, colourless, toxic gas.

Applications
In the semiconductor industry, trimethylboron is used:

  • as a boron source for the simultaneous deposition of boron and carbon or as the boron source in BPSG deposition.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel.
Plastics: Kel-F.

Technical Properties
Molecular Weight: 55.92
Specific Gravity (Air = 1): 1.9
Odour: Repulsive
CAS Registry No.: 593-90-8