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Tungsten Hexafluoride

Tungsten Hexafluoride, WF6, is a colourless, toxic, nonflammable, corrosive gas shipped in nickel cylinders.

In the semiconductor industry, Tungsten Hexafluoride is used for:

  • low pressure or plasma-enhanced CVD of tungsten and tungsten silicides.

Materials Compatibility
Metals: Stainless Steel; Nickel; Monel.
Plastics: PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF; Polyvinylchloride.

Technical Properties
Molecular Weight: 297.84
Specific Gravity (Air = 1): 10.8
Odour: None
CAS Registry No.: 7783-82-6