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Arsine, AsH3, is a colourless, poisonous, flammable, liquefied, compressed gas.

Pure arsine is used:

  • in semiconductor fabrication, arsine is an n-type dopant for epitaxial silicon (often mixed with hydrogen)
  • for doping selected regions of silicon wafer using deposition/diffusion techniques to form shallow structures such as emitters or source drain contacts (usually high ppm to percentage mixtures with nitrogen)
  • or for doping selected regions using ion implantation (often mixed with hydrogen)
  • in various chemical reactions.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Copper; Monel; Hastelloy C.
Plastics: Kel-F; PTFE; Nylon.
Elastomers: Viton.

Technical Properties
Molecular Weight: 77.95
Specific Gravity (Air=1): 2.7
Odour: Garlic-Like
CAS Registry No.: 7784-42-1