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Boron Trichloride

Boron Trichloride, BCl3, is a colourless, toxic, nonflammable, corrosive liquid shipped at its vapour pressure of 4.4 psig (30 kPa) at 70°F (21°C).

In the semiconductor industry, boron trichloride is used for:

  • P-type diffusion in silicon
  • ion implantation
  • plasma etching of metals.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Copper; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF; Polyvinylchloride.
Elastomers: Viton.

Technical Properties
Molecular Weight: 117.17
Specific Gravity (Air=1): 4.0
Odour: Pungent, Irritating
CAS Registry No.: 10294-34-5