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Diborane

Diborane, B2H6, is a colourless, poisonous, flammable, high-pressure gas mixture.

Applications
In the semiconductor industry, diborane is used:

  • as a p-type dopant, for epitaxial silicon, (usually ppm mixtures with hydrogen balance gas)
  • for doping selected regions of a silicon wafer using deposition/diffusion techniques (usually high ppm mixtures with nitrogen)
  • for doping polycrystalline silicon for interconnects or certain capacitors and
  • for forming borophosphosilicate glasses (usually percentage mixtures with silane).

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Copper; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF; Kalrez.
Elastomers: Viton.

Technical Properties
Molecular Weight: 27.67
Specific Gravity (Air = 1): 0.95
Odour: Repulsive, Sickly Sweet
CAS Registry No.: 19287-45-7