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Hydrogen bromide

Hydrogen bromide, HBr, is a colourless, toxic, corrosive gas shipped at its own vapour pressure of 320 psig (2,200 kPa) at 70°F (21°C).

In the semiconductor industry, hydrogen bromide is used for:

  • plasma etching of polysilicon.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Monel.
Plastics: PTFE, FEP, and PFA Fluoropolymers resins; PVDF.
Elastomers: Viton.

Technical Properties
Molecular Weight: 80.92
Specific Gravity (Air=1): 2.8
Odour: Very irritating
CAS Registry No.: 10035-10-6