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Silane

Silane, SiH4, is a colourless, spontaneously flammable, high-pressure gas.

Applications
In the semiconductor industry, silane is used for:

  • polycrystalline deposition for interconnects or masking
  • growth of epitaxial silicon
  • chemical vapour deposition of silicon dioxide, silicon nitride, silicon carbide, and refractory metal silicides
  • implantation silicon sources, amorphous silicon devices such as photosensitive drums or solar cells
  • thin layer deposition on flat glass.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Copper; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; PVDF; Polyvinylchloride.
Elastomers: Viton; Buna-N; Neoprene.

Technical Properties
Molecular Weight: 32.12
Specific Gravity (Air=1): 1.11
Odour: Choking
CAS Registry No.: 7803-62-5