Contact us generico

Contact Us

+39.035.328.111

 

siad@siad.eu

Silicon Tetrachloride

Silicon Tetrachloride, SiCl4, is a colourless, toxic, nonflammable, corrosive liquid with a vapour pressure of 3.75 psia (26 kPa) at 70°F (21°C).

Applications
In the semiconductor industry, silicon tetrachloride is used for:

  • applications of epitaxial silicon
  • plasma etching of metals.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; PVDF.
Elastomers: Viton.

Technical Properties
Molecular Weight: 169.90
Specific Gravity (Air=1): 5.8
Odour: Pungent, Suffocating
CAS Registry No.: 10026-04-7