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Silicon Tetrachloride

Silicon Tetrachloride, SiCl4, is a colourless, toxic, nonflammable, corrosive liquid with a vapour pressure of 3.75 psia (26 kPa) at 70°F (21°C).

In the semiconductor industry, silicon tetrachloride is used for:

  • applications of epitaxial silicon
  • plasma etching of metals.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; PVDF.
Elastomers: Viton.

Technical Properties
Molecular Weight: 169.90
Specific Gravity (Air=1): 5.8
Odour: Pungent, Suffocating
CAS Registry No.: 10026-04-7