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Silicon Tetrafluoride

Silicon Tetrafluoride, SiF4, is a colourless, poisonous acid gas.

In the semiconductor industry, silicon tetrafluoride is used:

  • for ion implantation and in conjunction with silane for the plasma deposition of fluorinated silica
  • sometimes as a silicon etch rate moderator in plasma etching.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel.
Plastics: Kel-F.

Technical Properties
Molecular Weight: 104.08
Specific Gravity (Air=1): 3.7
Odour: Pungent
CAS Registry No.: 7783-61-1