Silicon tetrafluoride header
Silicon Tetrafluoride, SiF4, is a colourless, poisonous acid gas.
In the semiconductor industry, silicon tetrafluoride is used:
- for ion implantation and in conjunction with silane for the plasma deposition of fluorinated silica
- sometimes as a silicon etch rate moderator in plasma etching.
Metals: Stainless Steel; Carbon Steel.
Molecular Weight: 104.08
Specific Gravity (Air=1): 3.7
CAS Registry No.: 7783-61-1